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EE HomePage.com Educational & Career Development Resources for Electrical and Electronics Engineers
EE HomePage.com brings together a diverse set of resources targeted at electronics engineers, educators and students. Most are available at little or no cost, and more are being added on a regular basis.
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MEMS Accelerometers
This is a nice, 17 page, introduction to MEMS accelerometers. It starts with a basic introduction to MEMS, moves on to capacitive plate sensing and demodulation, sensor noise characteristics, applications and MEMS fabrication.
System and Circuit Design for a Capacitive MEMS Gyroscope
This 279 page PhD Thesis from the Helsinki University of Technology discusses 1 and 2 degree of freedom resonators, the Coriolis Effect, mechanical-thermal noise, and bulk and surface micromachining. It reviews a number of published microgyroscopes, discusses synchronous demodulation, resonator excitation, capacitive readout and more.
Theory and Design of Micromechanical Vibratory Gyroscopes
This 20 page excerpt from The MEMS/NEMS Handbook provides a "general approach to the analysis of the dynamics and errors of
different types of micromechanical vibratory gyroscopes as well as calculation of their
performances for application in the design of such gyroscopes."
